Interfacial fracture of micro thin film interconnects under monotonic and cyclic loading
The goal of this research was to develop new experimental techniques to quantitatively study the interfacial fracture of micro-contact thin film interconnects used in microelectronic applications under monotonic and cyclic loadings. The micro-contact spring is a new technology that is based on physi...
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Georgia Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1853/26489 |