Development of micromachined millimeter wave modules for wireless communication systems
This research discusses the design, fabrication, integration, and characterization of micromachined millimeter-wave components and a signal source for THz multiplier source using the deep reactive ion etching technique. A wide range of advanced micromachined millimeter-wave components are proposed a...
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Georgia Institute of Technology
2010
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| Online Access: | http://hdl.handle.net/1853/34782 |