Dielectric charging in capacitive RF MEMS switches with silicon nitride and silicon dioxide
Capacitive radio frequency (RF) micro-electromechanical (MEMS) switches are among the most promising applications in MEMS systems. They have been introduced in the last 15-20 years as a practical alternative over traditional semiconductor switches. Low-cost RF MEMS switches are prime candidates for...
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Georgia Institute of Technology
2011
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| Online Access: | http://hdl.handle.net/1853/39504 |