Metrology of High Aspect Ratio MEMS
The current tools for geometric analysis of micro-electromechanical systems (MEMS) are primarily limited to those of the semiconductor industry. These tools are suited for measuring entities that are two-dimensional in nature such as lines, circles, and planes. Hardware that is capable of collecti...
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| Format: | Others |
| Language: | en_US |
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Georgia Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1853/5187 |