Congestion-aware dynamic routing in automated material handling systems
In semiconductor manufacturing, automated material handling systems (AMHSs) transport wafers through a complex re-entrant manufacturing process. In some systems, Overhead Hoist Transport (OHT) vehicles move throughout the facility on a ceiling-mounted track system, delivering wafers to machines and...
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Format: | Others |
Language: | en_US |
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Georgia Institute of Technology
2015
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Online Access: | http://hdl.handle.net/1853/53013 |