Integrated inertial measurement units using silicon bulk-acoustic wave gyroscopes
This dissertation discusses the design, simulation and characterization of process-compatible accelerometers and gyroscopes for the implementation of multi-degree-of-freedom (multi-DOF) systems. All components presented herein were designed to operate under the same vacuum-sealed environment to faci...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
Georgia Institute of Technology
2016
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1853/54283 |