Microfabricated Fuel Cells To Power Integrated Circuits
Microfabricated fuel cells have been designed and constructed on silicon integrated circuit wafers using many processes common in integrated circuit fabrication, including sputtering, polymer spin coating, reactive ion etching, and photolithography. Fuel delivery microchannels were made through the...
| Main Author: | |
|---|---|
| Format: | Others |
| Language: | en_US |
| Published: |
Georgia Institute of Technology
2005
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1853/7106 |