Active control of a diffraction grating interferometer for microscale devices
This thesis describes the creation of a metrology system based upon an actively controlled diffraction grating interferometer, which measures relative linear distances. The dynamics of this sensor are estimated based on experimental testing, and a suitable controller is designed to maintain the posi...
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| Format: | Others |
| Language: | en_US |
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Georgia Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1853/7261 |