Piezoelectrically-Transduced Silicon Micromechanical Resonators
This thesis reports on the design and fabrication of micro-electro-mechanical (MEM) resonators on silicon that are piezoelectrically-transduced for operation in the very high frequency (VHF) range. These devices have a block-type or beam-type design, and are designed to resonate in their in-plane an...
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| Format: | Others |
| Language: | en_US |
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Georgia Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1853/7478 |