Interdigital Capacitive Micromachined Ultrasonic Transducers for Microfluidic Applications

Interdigital Capacitive Micromachined Ultrasonic Transducers for Microfluidic Applications

The goal of this research was to develop acoustic sensors and actuators for microfluidic applications. To this end, capacitive micromachined ultrasonic transducers (cMUTs) were developed which generate guided acoustic waves in fluid half-spaces and microchannels. An interdigital transducer structure...

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Bibliographic Details
Main Author: McLean, Jeffrey John
Format: Others
Language:en_US
Published: Georgia Institute of Technology 2006
Subjects:
Acoustic streaming
Micropump
Scholte wave
Ultrasound
Flow sensor
Fluid sensor
Microfluidics
Guided acoustic wave
Ultrasonic transducers Design and construction
Microelectromechanical systems
Online Access:http://hdl.handle.net/1853/7625

Internet

http://hdl.handle.net/1853/7625

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