A study on the dielectrics of charge-trapping flash memory devices

Discrete charge-trapping flash memory is being developed for the next-generation commercial flash-memory applications due to its advantages over the traditional floating-gate counterpart. Currently, Si3N4 is widely used as charge-trapping layer (CTL). However, Si3N4 has low dielectric constant and s...

Full description

Bibliographic Details
Main Authors: Tao, Qingbo, 陶庆波
Other Authors: Lai, PT
Language:English
Published: The University of Hong Kong (Pokfulam, Hong Kong) 2014
Subjects:
Online Access:http://hdl.handle.net/10722/196488