Cold Atmospheric Plasma System - Simulation, Fabrication, Diagnosis and Thinfilm deposition
In this thesis, we report the various aspects of fabricating a Cold Atmospheric Plasma system, which can be used for Plasma Enhanced Chemical Vapour Deposition. The greatest advantage of this system is its vacuum free operation, which provides a cost e effctive alternative over conventional high vac...
| Main Author: | |
|---|---|
| Other Authors: | |
| Language: | en_US |
| Published: |
2018
|
| Subjects: | |
| Online Access: | http://etd.iisc.ernet.in/2005/3544 http://etd.iisc.ernet.in/abstracts/4413/G28347-Abs.pdf |