Cold Atmospheric Plasma System - Simulation, Fabrication, Diagnosis and Thinfilm deposition
In this thesis, we report the various aspects of fabricating a Cold Atmospheric Plasma system, which can be used for Plasma Enhanced Chemical Vapour Deposition. The greatest advantage of this system is its vacuum free operation, which provides a cost e effctive alternative over conventional high vac...
Main Author: | Anand, Venu |
---|---|
Other Authors: | Rao, G Mohan |
Language: | en_US |
Published: |
2018
|
Subjects: | |
Online Access: | http://etd.iisc.ernet.in/2005/3544 http://etd.iisc.ernet.in/abstracts/4413/G28347-Abs.pdf |
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