Study Of Squeeze Film Effects In Modelling Dynamic MEMS Devices

Study Of Squeeze Film Effects In Modelling Dynamic MEMS Devices

We present studies on squeeze film effects in dynamic MEMS devices with a special emphasis on the development of compact analytical models. First, the efficacy of lumped parameter modelling of dynamic MEMS devices is illustrated in MATLAB/SIMULINK software environment using a MEMS gyroscope and a M...

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Bibliographic Details
Main Author: Mohite, Suhas
Other Authors: Pratap, Rudra
Language:en_US
Published: 2011
Subjects:
Microelectromechanical Devices
Squeeze Film Effects
Microelectromechanical Devices - Modelling
Squeeze Film Model
Equivalent Circuits
Simulink Models
MEMS Device
Squeeze Films
Electromechanical Engineering
Online Access:http://hdl.handle.net/2005/1072

Internet

http://hdl.handle.net/2005/1072

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