Force-Amplifying Compliant Mechanisms For Micromachined Resonant Accelerometers
This thesis work provides an insight into the design of Force-amplifying Compliant Mechanisms (FaCMs) that are integrated with micromachined resonant accelerometers to increase their sensitivity. An FaCM, by mechanically amplifying the inertial force, enhances the shift in the resonance frequency of...
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Language: | en_US |
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2013
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Online Access: | http://etd.iisc.ernet.in/handle/2005/1966 http://etd.ncsi.iisc.ernet.in/abstracts/2547/G24900-Abs.pdf |