Force-Amplifying Compliant Mechanisms For Micromachined Resonant Accelerometers

Force-Amplifying Compliant Mechanisms For Micromachined Resonant Accelerometers

This thesis work provides an insight into the design of Force-amplifying Compliant Mechanisms (FaCMs) that are integrated with micromachined resonant accelerometers to increase their sensitivity. An FaCM, by mechanically amplifying the inertial force, enhances the shift in the resonance frequency of...

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Bibliographic Details
Main Author:	Madhavan, Shyamsananth
Other Authors:	Ananthasuresh, G K
Language:	en_US
Published:	2013
Subjects:	Resonant Accelerometers Micromachined Resonance Accelaration Measurement Force-amplifying Compliant Mechanisms (FaCMs) Resonant Microsensors Resonant-Sensing Euler-Bernoulli Beam Theory Lumped Parameter Model (LPM) Machine Engineering
Online Access:	http://etd.iisc.ernet.in/handle/2005/1966 http://etd.ncsi.iisc.ernet.in/abstracts/2547/G24900-Abs.pdf

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