Novel Diffraction Based Deflection Profiling For Microcantilever Sensor Technology
A novel optical diffraction based technique is proposed and demonstrated to measure deflections of the order of ~1nm in microcantilevers (MC) designed for sensing ultra-small forces of stress. The proposed method employs a double MC structure where one of the cantilevers acts as the active se...
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| Language: | en_US |
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2015
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| Online Access: | http://hdl.handle.net/2005/2433 http://etd.ncsi.iisc.ernet.in/abstracts/3129/G25126-Abs.pdf |