Development Of Micromachined And Meso-Scale Multi-Axis Accelerometers With Displacement-Amplifying Compliant Mechanisms

Development Of Micromachined And Meso-Scale Multi-Axis Accelerometers With Displacement-Amplifying Compliant Mechanisms

Simultaneously achieving high-sensitivity and a large resonance frequency of micromachined accelerometers is difficult because of the inherent trade-off between the two. In this thesis, we present a mechanical displacement-amplifying technique that is amenable to micromachining to enhance sensitivit...

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Bibliographic Details
Main Author: Khan, Sambuddha
Other Authors: Ananthasuresh, G K
Language:en_US
Published: 2017
Subjects:
Micromachined Accelerometers
Accelerometers
Mesoscale Spring-Steel Accelerometers
Multi-Axis Accelerometers
Displacenent-Amplifying Compliant Mechanisms (DaCMs)
Compliant Mechanisms
Capacitive Micromachined Accelerometers
Mechanical Displacement Amplifying
Microelectromechanical Systems
Mesoscale Accelerometer
Dual-Axis Micro-Accelerometer
Compliant Displacement-amplifiers
Dual-axis Spring-steel Accelerometers
Mesoscale Dual-axis Steel Accelerometer
Electrinic Engineering
Online Access:http://hdl.handle.net/2005/2602
http://etd.ncsi.iisc.ernet.in/abstracts/3393/G26016-Abs.pdf

Internet

http://hdl.handle.net/2005/2602
http://etd.ncsi.iisc.ernet.in/abstracts/3393/G26016-Abs.pdf

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