Design and Development of Microstereolithography (MSL) System and Its Applications in Microfabrication of Polymer and Ceramic Structures

Design and Development of Microstereolithography (MSL) System and Its Applications in Microfabrication of Polymer and Ceramic Structures

In the present era where MEMS (Micro Electro-Mechanical Systems) technology is in¬evitable from the perspective of applications in non-silicon based micro-devices (such as biosensors, microfluidics, microvalves etc.), it is imperative to develop different micro¬fabrication technologies which are sim...

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Bibliographic Details
Main Author: Goswami, Ankur
Other Authors: Umarji, Arun M
Language:en_US
Published: 2017
Subjects:
Microstereolithography
Microfabrication
Microfabrication of Ceramics
Poly(HDDA) Microcantilever
Polymer Microcantilevers
Microstructure Fabrication
Metalorganic Precursors
Microcantilevers
Photopolymerization
Photoinitiators
Fabrication
MSL System
Microfabrication of Polymers
Materials Science
Online Access:http://hdl.handle.net/2005/2840
http://etd.ncsi.iisc.ernet.in/abstracts/3691/G25987-Abs.pdf

Internet

http://hdl.handle.net/2005/2840
http://etd.ncsi.iisc.ernet.in/abstracts/3691/G25987-Abs.pdf

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