Design and Development of Capacitive Micromachined Ultrasonic Transducers
This thesis presents the design and analysis for development of a Capacitive Micromachined Ultrasonic Transducer (CMUT), a novel sensor and actuator, aimed at replacing the conventional piezoelectric transducers for air-coupled ultrasonic imaging applications. These CMUTs are fabricated using the si...
| Main Author: | |
|---|---|
| Other Authors: | |
| Language: | en_US |
| Published: |
2018
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/2005/3164 http://etd.ncsi.iisc.ernet.in/abstracts/4024/G25501-Abs.pdf |