A Study of Mode Dependent Energy Dissipation in 2D MEMS Resonators

A Study of Mode Dependent Energy Dissipation in 2D MEMS Resonators

With the advent of micro and nano electromechanical systems (MEMS/NEMS), there has been rapid development in the design and fabrication of sensitive resonant sensors. Sensitivity of such devices depends on the resonant frequency and the quality factor (Q). The Q of these devices are dependent on pro...

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Bibliographic Details
Main Author: Doreswamy, Santhosh
Other Authors: Pratap, Rudra
Language:en_US
Published: 2018
Subjects:
Nano Electromechanical Systems
Resonant Sensors
Micro Electromechanical Systems
MEMS Resonators
Mechanical Energy Dissipation
Mechanical Damping Modeling
Uncapped MEMS Drumhead Resonators
Micromechanical Resonators
Capped MEMS Drumhead Resonators
Squeeze Film Losses
Rarefied Squeeze Film Flows
Micromechanical 2D Resonator
Drumhead Microresonator
Capped Drumhead Microresonator
Circular Drum Resonator
Mechanical Engineering
Online Access:http://hdl.handle.net/2005/3178
http://etd.ncsi.iisc.ernet.in/abstracts/4039/G26346-Abs.pdf

Internet

http://hdl.handle.net/2005/3178
http://etd.ncsi.iisc.ernet.in/abstracts/4039/G26346-Abs.pdf

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