Design of an in-situ ellipsometer
Ellipsometry is a nondestructive analysis technique for studying surfaces, interfaces and thin films. The fabrication of multilayered structures, which can consist of several hundred layers, by sputter deposition of two materials having different refractive indices requires careful control of the in...
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| Language: | English |
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2008
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| Online Access: | http://hdl.handle.net/2429/2022 |