Design and modeling of a MEMS-based accelerometer with pull in analysis
This thesis reports the design and modelling of a MEMS (Micro Electro Mechanical system) based inertial accelerometer. The main motivation to design a differential type of accelerometer is that such a kind of structure allows differential electrostatic actuation and capacitive sensing. They can b...
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| Language: | English |
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University of British Columbia
2009
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| Online Access: | http://hdl.handle.net/2429/4165 |