Non-invasive internal pattern extraction of integrated circuits using electrostatic force microscopy

Improvements in technology of the microelectronic areas have allowed researchers to develop Integrated Circuits (ICs) with higher speed and smaller size. However these improvements have also increased the difficulties for diagnostic testing of the circuits in the radio frequency (RF) range. The ide...

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Bibliographic Details
Main Author: Lam, Tam Le
Language:en_US
Published: 2007
Online Access:http://hdl.handle.net/1993/1740