Hydrogenated Amorphous Silicon Carbide Prepared using DC Saddle Field PECVD for Photovoltaic Applications
Hydrogenated amorphous silicon carbide (a-SiC:H) can provide exceptional surface passivation essential for high-efficiency crystalline silicon solar cells. This thesis reports on the fundamental study of a-SiC:H films deposited using a novel deposition technique, DC saddle field PECVD, in contrast t...
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| Language: | en_ca |
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2011
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| Online Access: | http://hdl.handle.net/1807/31649 |