Design, Optimization and Fabrication of Amorphous Silicon Tunable RF MEMS Inductors and Transformers

High performance inductors are playing an increasing role in modern communication systems. Despite the superior performance offered by discrete components, parasitic capacitances from bond pads, board traces and packaging leads reduce the high frequency performance and contribute to the urgency of a...

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Bibliographic Details
Main Author: Chang, Stella
Format: Others
Language:en
Published: 2007
Subjects:
Online Access:http://hdl.handle.net/10012/2657