Novel RF MEMS Varactors Realized in Standard MEMS and CMOS Processes

Novel RF MEMS Varactors Realized in Standard MEMS and CMOS Processes

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Micro-Electro-Mechanical Systems (MEMS) varactors have the potential to replace conventional varactor diodes, due to their high loss and non-linearity, in many applications such as phase shifters, oscillators, and tunable filters. The objective of this thesis is to develop novel MEMS varactors to im...

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Bibliographic Details
Main Author: Bakri-Kassem, Maher
Language:en
Published: 2007
Subjects:
RF MEMS
Varactor
CMOS MEMS Integration
Variable capacitor
post processing
MEMS
Electrical and Computer Engineering
Online Access:http://hdl.handle.net/10012/3456

Internet

http://hdl.handle.net/10012/3456

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