Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging

Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging

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Micro-Electro-Mechanical Systems (MEMS) micromirrors have been developed for more than two decades along with the development of MEMS technology. They have been used into many application fields: optical switches, digital light projector (DLP), adoptive optics (AO), high definition (HD) display, bar...

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Bibliographic Details
Main Author: Bai, Yanhui
Language:en
Published: 2010
Subjects:
MEMS
micromirror
sidewall electrodes
shadow mask
confocal microscope
Endoscopic OCT
System Design Engineering
Online Access:http://hdl.handle.net/10012/5381

Internet

http://hdl.handle.net/10012/5381

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