The Design, Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers for Imaging Applications
Capacitive micromachined ultrasonic transducers (CMUTs) have proven themselves to be excellent candidates for medical ultrasonic imaging applications. The use of semiconductor fabrication techniques facilitates the fabrication of high quality arrays of uniform cells and elements, broad acoustic band...
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| Language: | en |
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2010
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| Online Access: | http://hdl.handle.net/10012/5583 |