Automated Micromanipulation of Micro Objects
In recent years, research efforts in the development of Micro Electro Mechanical Systems, (MEMS) including microactuators and micromanipulators, have attracted a great deal of attention. The development of microfabrication techniques has resulted in substantial progress in the miniaturization of dev...
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| Language: | en |
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2011
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| Online Access: | http://hdl.handle.net/10012/6129 |