A Multifunctional MEMS Pressure and Temperature Sensor for Harsh Environment Applications
The objective of this thesis was to develop a fast-response multifunctional MEMS (Micro Electro Mechanical Systems) sensor for the simultaneous measurement of in-cylinder pressure and temperature in an internal combustion (IC) engine. In a representative IC engine, the pressure and temperature can r...
| Main Author: | |
|---|---|
| Language: | en |
| Published: |
2013
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10012/7346 |