Design, Fabrication and Validation of a CMOS-MEMS Kelvin Probe Force Microscope
The Kelvin Probe Force Microscope is a type of scanning probe instrument that is used to discern the different work functions of a sample. A sharp probe at the end of a cantilever is lowered onto a substrate where electrostatic forces, caused by the difference in work function cause the cantilever t...
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| Language: | en |
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2013
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| Online Access: | http://hdl.handle.net/10012/7452 |