Experimental investigation and modeling of anisotropic etching of silicon in tetra-methyl ammonium hydroxide
Anisotropic etching of silicon is a fundamental process in micro-systems technology (MST) and in the fabrication of micro-electromechanical systems (MEMS). This work addresses the fundamental atomic mechanisms of anisotropic etching of single-crystal silicon, by wagon-wheel-based under-etch experime...
| Main Author: | |
|---|---|
| Format: | Others |
| Published: |
2002
|
| Online Access: | http://spectrum.library.concordia.ca/1736/1/MQ68445.pdf Pandy, Anand <http://spectrum.library.concordia.ca/view/creators/Pandy=3AAnand=3A=3A.html> (2002) Experimental investigation and modeling of anisotropic etching of silicon in tetra-methyl ammonium hydroxide. Masters thesis, Concordia University. |
Internet
http://spectrum.library.concordia.ca/1736/1/MQ68445.pdfPandy, Anand <http://spectrum.library.concordia.ca/view/creators/Pandy=3AAnand=3A=3A.html> (2002) Experimental investigation and modeling of anisotropic etching of silicon in tetra-methyl ammonium hydroxide. Masters thesis, Concordia University.