Design, fabrication and characterization of RF MEMS inductors and switches
MicroElectroMechanical Systems (MEMS) concept covers different miniature devices in different disciplines, including but not limited to biological, chemical, electrical, fluidic, magnetic, optical, and thermal applications. Initially, the background of MEMS, RF MEMS and fabrication technologies are...
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2006
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| Online Access: | http://spectrum.library.concordia.ca/8978/1/MR14259.pdf Mesgar, Alireza Hajhosseini <http://spectrum.library.concordia.ca/view/creators/Mesgar=3AAlireza_Hajhosseini=3A=3A.html> (2006) Design, fabrication and characterization of RF MEMS inductors and switches. Masters thesis, Concordia University. |
Internet
http://spectrum.library.concordia.ca/8978/1/MR14259.pdfMesgar, Alireza Hajhosseini <http://spectrum.library.concordia.ca/view/creators/Mesgar=3AAlireza_Hajhosseini=3A=3A.html> (2006) Design, fabrication and characterization of RF MEMS inductors and switches. Masters thesis, Concordia University.