Nonlinear dynamic analysis of electrostatically actuated MEMS structures
Micro Electro Mechanical Systems (MEMS) such as microsensors and microactuators that use the electrostatic force between electrodes for sensing and actuation, have numerous advantages over other actuation mechanisms due to their ease of operation, simplicity and favourable scaling laws in the micro...
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2006
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| Online Access: | http://spectrum.library.concordia.ca/9161/1/MR34594.pdf Kalyanaraman, Rakesh <http://spectrum.library.concordia.ca/view/creators/Kalyanaraman=3ARakesh=3A=3A.html> (2006) Nonlinear dynamic analysis of electrostatically actuated MEMS structures. Masters thesis, Concordia University. |