Fabrication, structural relaxation, and flow in solid-state nanopores
Single solid-stat nanopores have been fabricated in free-standing layers of amorphous silicon nitride. Using a focused electron beam and a focused ion beam, diameters ranging from about 0.7 nm to a few hundred nanometerswere achieved. Structural relaxation of nanopores fabricated by focused electron...
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| Format: | Others |
| Language: | en |
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McGill University
2012
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| Online Access: | http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=107651 |