Thermoelastic coupling in flexural-mode micromechanical and nanomechanical resonators
Mechanical resonators, with dimensions ranging from hundreds of nanometers to hundreds of micrometers, constitute critical components of many microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) used for applications in sensing, communications, energy harvesting and materia...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en |
| Published: |
McGill University
2009
|
| Subjects: | |
| Online Access: | http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=94195 |