Fabrication of diffractive optical elements by electron beam lithography
Diffractive optical elements (DOEs) are an important component in the success of optical Microsystems. Electron beam lithography is a key part of fabricating these elements with submicron feature dimensions. This thesis presents work done on the development of a process for the fabrication of multil...
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| Format: | Others |
| Language: | en |
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McGill University
2011
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| Online Access: | http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=96963 |