Monolithic Integration of High-Aspect-Ratio Microstructures with CMOS Circuitry
This work involves developing processing techniques for monolithically integrating a high-aspect-ratio microstructures with CMOS circuitry. A microsystem comprising of a microprobe array and signal processing circuitry is utilized as a test vehicle to demonstrate this fabrication process. One potent...
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| Format: | Others |
| Language: | en |
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LSU
2007
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| Online Access: | http://etd.lsu.edu/docs/available/etd-06242007-210547/ |