Development of Process Techniques for Bistable Microbeam Fabrication
A design which uses bistable beams to modulate light is suggested in this thesis and appropriate processing techniques are presented. A beam when placed under compression above the Euler limit has two stable states. The compression in an electroplated beam can be controlled by the plating current d...
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Format: | Others |
Language: | en |
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LSU
2005
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Online Access: | http://etd.lsu.edu/docs/available/etd-08252005-130402/ |