Micro & Nano Scale Mechanical Testing and Assembly with Applications to Metal Based Microsystems
Metal-based high-aspect-ratio microscale structures (HARMS) are fundamental building blocks for functional metallic micro devices. This dissertation focuses on addressing several problems in fabrication and assembly of metal based microchannel devices. First, the materials responses to mechanical de...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en |
| Published: |
LSU
2013
|
| Subjects: | |
| Online Access: | http://etd.lsu.edu/docs/available/etd-11112013-150154/ |