Skew measurement by scanning electrostatic force microscopy
Observation of signals at internal nodes is an important part of integrated circuit failure analysis. However, decreasing circuit dimensions and operating voltages and increasing complexity and clock speeds are making these observations more difficult. The electrostatic force microscope is an instr...
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| Language: | en_US |
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2007
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| Online Access: | http://hdl.handle.net/1993/1804 |