Capacitive Micromachined Ultrasonic Transducers: Design, Fabrication and Characterization
Capacitive micromachined ultrasonic transducers (CMUTs) have been developed as an alternative to piezoelectric transducers for ultrasonic imaging in non-destructive testing applications. These CMUTs offer substantial advantages over their piezoelectric counterparts, which include a highly miniaturiz...
| Main Author: | |
|---|---|
| Other Authors: | |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1993/23928 |