Electrostatic testing of simple MEMS structures
In this thesis, an adapted form of dynamic Electrostatic Force Microscopy is presented as an alternative technique for non-contact dynamic characterization of beam resonators. The actuation of the test resonant beam was accomplished by applying a modulated signal to a probe cantilever that was pos...
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| Language: | en_US |
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2006
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| Online Access: | http://hdl.handle.net/1993/259 |