Design, modeling and fabrication of a copper electroplated MEMS, membrane based electric field sensor
A MEMS based electrostatic field sensor is presented which uses capacitive interrogation of an electrostatic force deflected microstructure. First the deflection of the sensor’s membrane which is caused by electrostatic force in the presence of electric field is calculated both by simulation and the...
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2015
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| Online Access: | http://hdl.handle.net/1993/30182 |