Roadmap of mechanical systems design for the semiconductor automatic test equipment industry

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998. === Vita. === Includes bibliographical references (p. 291-294). === by Michael Alec Chiu. === Ph.D.

Bibliographic Details
Main Author: Chiu, Michael Alec, 1968-
Other Authors: Alexander H. Slocum.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/10073