Low loss polysilicon waveguides for silicon photonics

Low loss polysilicon waveguides for silicon photonics

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997. === Includes bibliographical references (leaves 106-109). === Ling Liao. === M.S.

Bibliographic Details
Main Author: Liao, Ling
Other Authors: Lionel C. Kimerling.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Materials Science and Engineering
Online Access:http://hdl.handle.net/1721.1/10230

Internet

http://hdl.handle.net/1721.1/10230

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