In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition

In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995. === Includes bibliographical references (leaves 179-186). === by Sateria Salim. === Ph.D.

Bibliographic Details
Main Author: Salim, Sateria
Other Authors: Klavs F. Jensen.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Chemical Engineering
Online Access:http://hdl.handle.net/1721.1/11378

Internet

http://hdl.handle.net/1721.1/11378

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