Cost benefit analysis of process change implementation : alternate wet cleaning technology in the semiconductor manufacturing industry
Thesis: S.B., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 2001. === Cataloged from PDF version of thesis. === Includes bibliographical references (page 29). === Maintaining wafer surfaces free of contamination is an essential requirement for the successful...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2018
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| Online Access: | http://hdl.handle.net/1721.1/114092 |