A thin-film silicon microaccelerometer fabricated using electrochemical etch-stop and wafer bonding technology

A thin-film silicon microaccelerometer fabricated using electrochemical etch-stop and wafer bonding technology

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. === Includes bibliographical references (p. 343-360). === by Vincent Maurice McNeil. === Ph.D.

Bibliographic Details
Main Author: McNeil, Vincent Maurice
Other Authors: Martin A. Schmidt.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/12013

Internet

http://hdl.handle.net/1721.1/12013

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